Integrated nanotube circuits: Controlled growth and ohmic contacting of single-walled carbon nanotubes

Single-walled carbon nanotubes are synthesized by chemical vapor deposition of methane at controlled locations on a substrate using patterned catalytic islands. The combined synthesis and microfabrication technique presented here allows a large number of ohmically contacted nanotube devices with controllable length to be placed on a single substrate. Transport studies demonstrate ohmic contacting, giving two-terminal resistances as low as 20 kV at low temperatures. © 1999 American Institute of Physics. @S0003-6951~99!01331-5#